Investigating Characteristics of AlN-ZnO/ZnO/AlN-ZnO Structure Applied to Multi-Quantum Well
碩士 === 國立虎尾科技大學 === 光電與材料科技研究所 === 103 === In this study, by using RF magnetron co-sputtering system with ZnO and AlN target, respectively, deposited un-doped ZnO thin films and ZnO doped Al thin film, and using AlN-ZnO sputtering thin film to be a barrier layer, un-doped ZnO thin films to be acti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3wks3w |