Oxidation Behavior and Mechamical Properties of Multilayered AlCrSiN/TiVN Hard Coatings
碩士 === 國立虎尾科技大學 === 機械與電腦輔助工程系碩士班 === 103 === The experiment using cathodic arc evaporation deposition system AlCrSiN/TiVN multilayer film, the use of Ti target, AlCrSi target, and TiV target. Using TiN film as a interlayer increases the adhesion, re-use AlCrSi target and TiV target target the relat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/e7ayw9 |