The Boundary Condition Adjusted Electric Field Distribution in Smart-cut SOI for High Voltage Applications
碩士 === 東海大學 === 電機工程學系 === 103 === The purpose of this thesis is to adjust and unify the surface electric field of silicon-on-insulator (SOI) power devices by using a low dielectric constant buried material, in which air and SiO2 are alternately placed. The proposed device is compared with conventio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/92385840624969371389 |