The Study of Ag-Cu codoped ZnO Thin Films by RF Sputtering
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 103 === In this study, Ag-Cu codoped ZnO thin films on the silicon substrate(100) were prepared by RF magnetron sputtering system. We investigated the structure of the thin films by X-ray diffraction and their conductivity properties via Hall Effect measurement. F...
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Format: | Others |
Language: | zh-TW |
Online Access: | http://ndltd.ncl.edu.tw/handle/e97uut |