The growth of Sb/Ag co-doped ZnO Thin Films by RF Magnetron Sputtering
碩士 === 國立臺北科技大學 === 光電工程系研究所 === 103 === In this study, we investigated the Sb/Ag co-doping effects on ZnO films deposited on silicon by RF Magnetron Sputtering. The structure properties of ZnO thin films were characterized by X-ray diffraction(XRD). The electric properties were analyzed by Hall-eff...
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Online Access: | http://ndltd.ncl.edu.tw/handle/kdr8kg |