Design of a Mask Alignment System Using an AOI with two CCDs and a XXY Stage
碩士 === 國立臺北科技大學 === 自動化科技研究所 === 103 === In this study, an automatic optical inspection (AOI) guidance system is proposed. A co-plane XXY stage is integrated with two GIGA-E CCDs with lens, a PLC and a PC to perform automatic mask-alignment tasks. To replace manual operations for mask alignment task...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2014
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| Online Access: | http://ndltd.ncl.edu.tw/handle/5u72mg |