A Study of Plasma Temperature
碩士 === 國立臺北科技大學 === 機電整合研究所 === 103 === With the rapid development of semiconductor industry, the study of process technology the more important, the use of simulations projected results reduce costs and time. This study used the simulation of Microwave Plasma Jet Chemical Vapor Deposition , the rea...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/q4d7cu |