Improvements in the metallic film adhesion strength of thermal coating

碩士 === 國立臺北科技大學 === 機電整合研究所 === 103 === Now metallic film technics are important in the semiconductor industry and evaporation is one method of metallic film technics. However this research is to improve the performance of the thermal coating and successful rate for better metallic film adhesion str...

Full description

Bibliographic Details
Main Authors: Po-Chun Wang, 王柏鈞
Other Authors: Ho-Chiao Chuang
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/cgi-bin/gs32/gsweb.cgi/login?o=dnclcdr&s=id=%22103TIT05651105%22.&searchmode=basic