Development and Application of Energy Conversion Factors ( ECFs) of Fab Facility Systems

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 103 === Resource consumption directly impacts the cost of electronics industry and indirectly contributes to environmental pollution. The World Semiconductor Council and SEMI have issued their White paper on Energy suggesting normalized energy reductions for waf...

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Bibliographic Details
Main Authors: Yao-Wen Tsai, 蔡耀文
Other Authors: Shih-Cheng Hu
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/nepv7q