Effect of reaction gas on the growth behavior of diamond films synthesized by hot-filament CVD process

碩士 === 淡江大學 === 物理學系碩士班 === 103 === Diamond films are high thermal conductivity and high tribological characteristics. They have great potential for industrial applications. The capability for growing diamond d films in large area is an important research issue. The granular structure of diamond...

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Bibliographic Details
Main Authors: Tsung-Min Chen, 陳琮民
Other Authors: I-Nan Lin
Format: Others
Language:zh-TW
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/42416034228662442936