The Study on the Nanopositioning Stage by Hydraulic Actuator
碩士 === 東南科技大學 === 機械工程研究所 === 103 === In this study the ANSYS is used for micro-motion stage aided design. First several cases have been set up in accordance with literatures. The result of analysis has revealed that the combination of wave-shaped rib (R1 type) and cross-shaped spring (S1 type)...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75969224031196501202 |