Direct Micro/Nanoimprint and Fidelity Analysis with Full Patterns Grating
碩士 === 國立中正大學 === 機械工程系研究所 === 104 === The goal of direct nanoimprint process is to fabricate bi-layered metallic wire-grid polarizers (WGP). The most critical process of this fabrication is how to transfer full and large nano-pattern from mold to imprinted material. If this process works, this tech...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32117617615739678722 |