Device-level Doping Profile Analysis for Saddle-fin Device in 30 nm DRAM Technology Node

碩士 === 長庚大學 === 電子工程學系 === 104

Bibliographic Details
Main Authors: Hsiu Pin Chen, 陳修斌
Other Authors: C. M. Yang
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/u452zb