Scheduling jobs with dirt cleaning consideration to minimize the total tardiness
碩士 === 中原大學 === 工業與系統工程研究所 === 104 === This thesis is about wafer manufacturing of semiconductor where wafer cleaning should be avoid the pollution. Wafer cleaning is to clean up the dirt on the surface of wafer. Cleaning agent is the main materials of wafer cleaning, which can take away the dirt on...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87599024973895689834 |