Structure and Photoluminescence Properties of AlN film sputtered on Patterned Sapphire Substrate
碩士 === 中原大學 === 電子工程研究所 === 104 === In this thesis, we discuss the photoluminescence properties of AlN sputtered on Patterned Sapphire Substrate. At the same time, we look in further to its structure properties and elementary composition. In PL spectrum, we revealed a twin peaks PL spectrum at about...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9wyuqq |