High Power Impulse Magnetron Sputtering of Metal and Oxide Thin Film on Flexible Polyester Substrate
博士 === 逢甲大學 === 材料科學與工程學系 === 104 === High power impulse magnetron sputtering (HIPIMS) has been attracted much attention as a next generation power source owing to its remarkable plasma characteristics such as high density, high ionization, and high ionic energy, which enables to deposit high qualit...
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| Format: | Others |
| Language: | zh-TW |
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2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45711645068178645097 |