Characteristic Diagnosis and Investigation of a VHF Argon Plasma
碩士 === 逢甲大學 === 材料科學與工程學系 === 104 === A high density plasma with a large area has been required from Micro-electromechanical Systems (MEMS) as well as semiconductor industries. The development of the high density plasma of 15 inch in diameter for thin film deposition and etching treatment has partly...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40932230080083321004 |