Study of Gallium-based Thin Film Oxide Device for High Temperature Oxygen Sensor
碩士 === 遠東科技大學 === 機械工程研究所在職專班 === 104 === Novel oxygen gas sensor based on gallium oxide thin film operated at high temperature above 6000C has been analyzed in this thesis. First, gallium oxide thin films have been deposited on silicon substrate by sputtering method. Grain sizes of the material are...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68417215021413979106 |