Particle monitor and management
碩士 === 崑山科技大學 === 電機工程研究所 === 105 === Because cleanness of clean room increase day by day, the hi-tech industry such as Wafer Panel has more requirements. According to the theorem that laser sensor transform into voltage, monitoring particle by human machine interface when coating by photo resist co...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/91166578776541805736 |