The electro-optical characteristics and hydrogen sensing properties of indium zinc magnesium oxide films deposited by co-sputtering
碩士 === 崑山科技大學 === 電機工程研究所 === 104 === In this study,IMZO was co-sputted on a glass substrate by changing process parameters such as MgO doped with different power, different process time, different substrate temperature, in order to develop the opto -electronic characteristics of IMZO films Moreover...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/2yfzvv |