Research on Integrated Circuit Manufacturing Process Thermostatic Control System
碩士 === 崑山科技大學 === 電子工程研究所 === 104 === In this paper, we research on thermostatic control system of integrated circuit manufacturing process. The thermostatic control system is mainly applied to semiconductor etching process, it includes the refrigerant system and thermostatic control system. Thermos...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33286880553700150167 |