Apply Big Data Analysis Technique with the Semiconductor Device Plating Machine Maintenance and Repair Data for Yield Improvement
碩士 === 國立高雄應用科技大學 === 電機工程系博碩士班 === 104 === In the history of the semiconductor industry in recent years, in 2008 IBM announced the copper process developed, IC process technology from aluminum process technology to copper process technology, announcing the coming copper Cheng era, so equipment man...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88591648159975625762 |