Different process parameters on the optical and electrical properties of Mg:GZO thin film
碩士 === 國立高雄應用科技大學 === 機械與精密工程研究所 === 104 === In this study, it investigates the structural, optical and electronic properties ofMGZO（Mg：Ga： ZnO =92：3：5 at.%）thin films on corning glass substrate underdifferent annealing process by using radio frequency magnetron sputtering(RF-sputtering). The result...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/06192287498583306253 |