Development of magnetron sputtering process with micro-mold for fabrication of copper electrodes device
碩士 === 國立高雄應用科技大學 === 模具工程系 === 104 === In the traditional processes, photo-lithography are regarded as the best mass-production methods to fabricate conductive micro-structure devices. However, these processes require expensive equipment and complicated process steps. Therefore, this paper report...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/ncr3bn |