Process of CrAl(O,N) Oxide Coatings by Cathodic Arc Deposition
碩士 === 明道大學 === 材料與能源工程學系碩士班 === 104 === In this study, cathodic arc deposition and Cr, Cr30Al70 dual targets were used to synthesize the CrN, CrAlN, CrAlON and CrAl coatings at low temperature. Except the CrAl coating, the other coatings possess similar surface roughness, however, many submicro dro...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
|
Online Access: | http://ndltd.ncl.edu.tw/handle/77641476087901471408 |