Process of CrAl(O,N) Oxide Coatings by Cathodic Arc Deposition

• Main Authors: HSU,PIN-HUA, 徐品華
• Other Authors: HO,WEI-YU
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/77641476087901471408

碩士 === 明道大學 === 材料與能源工程學系碩士班 === 104 === In this study, cathodic arc deposition and Cr, Cr30Al70 dual targets were used to synthesize the CrN, CrAlN, CrAlON and CrAl coatings at low temperature. Except the CrAl coating, the other coatings possess similar surface roughness, however, many submicro droplets were sprayed on the coating surface due to the Al element with low melting temperature mixed in the target material. CrAlON coating decomposed of the Cr2O3, Al2O3 and CrN phases which present corundum structure. Vicker’s hardness test showed the highest hardness of Hv10g – 3180 for the CrAlN coating. The polarization test showed the CrAlN and CrAlON coatings possessed the best corrosion resistance in 1M H2SO4. The oxidation resistance of the CrAlON coating was up to 1000oC due to the Cr2O3, Al2O3 and CrN phases coexisted in the coating. The results will be the potential application of injection machine parts, IC molding die applications.