Early-Voltage Variation and Dependence of VT Implant for n-type FinFETs
碩士 === 明新科技大學 === 電子工程系碩士班 === 104 === Planar field effect transistors in semiconductor industry have been used for a long time, playing a main role in the past. Since the process technology is promoted, the shrinkage of device profile is well done. However, this technology gradually approaches the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47365866755668715959 |