Properties of CrSiN coatings fabricated by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and radio frequency (RF) sputtering
碩士 === 明志科技大學 === 材料工程系碩士班 === 104 === High power impulse magnetron sputtering (HIPIMS) already developed for more than 10 years. It is characterized by its ultra-high peak current and peak power density to obtain unique thin film properties, such as high hardness, good adhesion and tribological per...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19985625683330414592 |