Fabrication and characterization of MgF2-doped zinc oxide thin films by radio-frequency magnetron sputtering
碩士 === 國立中興大學 === 光電工程研究所 === 104 === In this study, magnesium and fluoride co-doped zinc oxide (MFZO) were deposited on Corning EagleXG glass substrate by RF magnetron sputtering system.We used four different ZnO targets having distinct MgF2 doping(contents 0at%, 1.5at%, 3at%, and 5at%), named ZnO,...
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18165900961526805300 |