Effects of different radio-frequency power on properties of p-type amorphous titanium carbon thin film alloys prepared by reactive sputtering deposition
碩士 === 國立中興大學 === 材料科學與工程學系所 === 104 === The effects of different radio-frequency powers on the plasma species, microstructures and optical/electrical properties of p-type amorphous titanium carbon (a-TiC) thin film alloys prepared by reactive sputtering deposition were investigated. Additionally, t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48795705147151910282 |