A Study of Laser Phase Shift Interferometry for the Surface Profile Restoration
碩士 === 國立中興大學 === 機械工程學系所 === 104 === Phase shifting interferometry is a common measurement technique to reduce the surface profile. The random phase interferometry can overcome the environmental vibration and suit for measurements on the factory. It often completely reconstructs surface with the LE...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/20207709197073330110 |