Low concentration ammonia micro sensor with polypyrrole coated graphene
碩士 === 國立中興大學 === 機械工程學系所 === 104 === This study presents a micro NH3 sensor. An NH3 sensing chip with a thermometer is fabricated through the commercial 0.18 μm CMOS-MEMS process of TSMC (Taiwan Semiconductor Manufacturing Company). Chemically reduced graphene oxide, polypyrrole coated graphene (...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/47403408502664504837 |