Three Axial Magnetic Microsensor Based on MAGFET and Magnetotransistor
碩士 === 國立中興大學 === 機械工程學系所 === 104 === This study designs and implements in standard CMOS-MEMS (Complementary metal oxide semiconductor-Micro electro mechanical system) process of TSMC (Taiwan Semiconductor Manufacturing Company). The magnetic field sensor is based on magneto-transistor structur...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24686307725725637006 |