Particle Reduction and Taguchi Analysis for Semi-conductor Plasma Etching Equipment
碩士 === 國立成功大學 === 工程科學系碩士在職專班 === 104 === Based on the competition of semiconductor in the world up to the twelve inch wafer, the yield of the wafer is an indicator of the enterprise viability in career, which inspires the study motivation of the thesis. Yield rate can be observed in three areas: th...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/69663265390727936086 |