Microwave Plasma Chemical Vapor Deposition of Boron Doped Diamond and its Sensor Applications

碩士 === 國立成功大學 === 微電子工程研究所 === 104 === Nowadays, Internet of things (IOT) is the most popular issue in our life. A wide range of sensors would play an important role in IOT. In the field of biotechnology, the implant sensors need very good biocompatibility and that is why diamond could be a choice...

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Bibliographic Details
Main Authors: Cheng-LungChung, 鍾政龍
Other Authors: Yon-Hua Tzeng
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/32c42n