Optimized Indium Gallium Zinc Oxide Films Applied to Thin-Film Transistors
博士 === 國立成功大學 === 微電子工程研究所 === 104 === In the research, the indium gallium zinc oxide (IGZO) films and the indium gallium zinc aluminum oxide (IGZAO) films were deposited using the magnetron radio frequency (RF) co-sputtering system. The electrical characteristics of the IGZO films and the IGZAO fil...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/m5ft5q |