Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode
碩士 === 國立成功大學 === 電機工程學系 === 104 === In this study, silicon-rich oxide/silicon dioxide multilayers (SRO/SiO2 MLs) were synthesized by reactive magnetron sputtering in a gas mixture of argon and oxygen. In particularly, the variation from 0 to1.0 sccm in the oxygen flow was used. The structural, opti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/x8ks73 |