Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode
碩士 === 國立成功大學 === 電機工程學系 === 104 === In this study, silicon-rich oxide/silicon dioxide multilayers (SRO/SiO2 MLs) were synthesized by reactive magnetron sputtering in a gas mixture of argon and oxygen. In particularly, the variation from 0 to1.0 sccm in the oxygen flow was used. The structural, opti...
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ndltd-TW-104NCKU54420252019-05-15T22:34:38Z http://ndltd.ncl.edu.tw/handle/x8ks73 Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode 多層富矽氧化物/二氧化矽發光二極體之研究 Syue-ChihTseng 曾學智 碩士 國立成功大學 電機工程學系 104 In this study, silicon-rich oxide/silicon dioxide multilayers (SRO/SiO2 MLs) were synthesized by reactive magnetron sputtering in a gas mixture of argon and oxygen. In particularly, the variation from 0 to1.0 sccm in the oxygen flow was used. The structural, optical, and electrical properties of the SRO/SiO2 MLs were investigated by TEM, PL, XPS and EL measurements, where the excitation laser was employed by the 325, 532 and 633 nm for the PL analysis. The PL emission was originated from the band-to-band transition within the Si-NCs and the radiative recombination centers at the Si-NCs/SiO2 interface. The results demonstrate that size of Si-NCs was decreased due to quantum-size effect as increasing the oxygen flow. The enhancement of EL in the visible range was achieved by using oxygen flow of 0.15 sccm. Relationship between PL and EL in the SRO/SiO2 MLs has been examined. The blueshift in the EL was attributed to the band filling effect under high current injection mode. The EL spectra at different oxygen flows were recorded, and the correlation between charge transport mechanisms and EL properties was discussed. Chuan-Feng Shih 施權峰 2016 學位論文 ; thesis 116 zh-TW |
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碩士 === 國立成功大學 === 電機工程學系 === 104 === In this study, silicon-rich oxide/silicon dioxide multilayers (SRO/SiO2 MLs) were synthesized by reactive magnetron sputtering in a gas mixture of argon and oxygen. In particularly, the variation from 0 to1.0 sccm in the oxygen flow was used. The structural, optical, and electrical properties of the SRO/SiO2 MLs were investigated by TEM, PL, XPS and EL measurements, where the excitation laser was employed by the 325, 532 and 633 nm for the PL analysis. The PL emission was originated from the band-to-band transition within the Si-NCs and the radiative recombination centers at the Si-NCs/SiO2 interface. The results demonstrate that size of Si-NCs was decreased due to quantum-size effect as increasing the oxygen flow. The enhancement of EL in the visible range was achieved by using oxygen flow of 0.15 sccm. Relationship between PL and EL in the SRO/SiO2 MLs has been examined. The blueshift in the EL was attributed to the band filling effect under high current injection mode. The EL spectra at different oxygen flows were recorded, and the correlation between charge transport mechanisms and EL properties was discussed.
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author2 |
Chuan-Feng Shih |
author_facet |
Chuan-Feng Shih Syue-ChihTseng 曾學智 |
author |
Syue-ChihTseng 曾學智 |
spellingShingle |
Syue-ChihTseng 曾學智 Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
author_sort |
Syue-ChihTseng |
title |
Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
title_short |
Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
title_full |
Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
title_fullStr |
Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
title_full_unstemmed |
Research of Silicon-Rich-Oxide/Silicon Dioxide Multilayers Based Light Emitting Diode |
title_sort |
research of silicon-rich-oxide/silicon dioxide multilayers based light emitting diode |
publishDate |
2016 |
url |
http://ndltd.ncl.edu.tw/handle/x8ks73 |
work_keys_str_mv |
AT syuechihtseng researchofsiliconrichoxidesilicondioxidemultilayersbasedlightemittingdiode AT céngxuézhì researchofsiliconrichoxidesilicondioxidemultilayersbasedlightemittingdiode AT syuechihtseng duōcéngfùxìyǎnghuàwùèryǎnghuàxìfāguāngèrjítǐzhīyánjiū AT céngxuézhì duōcéngfùxìyǎnghuàwùèryǎnghuàxìfāguāngèrjítǐzhīyánjiū |
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