The study on thermoelectric property of Silicon-Rich oxide/Silicon oxide and Si/Graphene multilayers

碩士 === 國立成功大學 === 電機工程學系 === 104 === In our research, the multilayers of silicon rich oxide/silicon dioxide and silicon/graphene were synthesized by reactive magnetron sputtering. The multilayers act as phonon block for the silicon substrate. Our objective is the reduction of thermal conductivity...

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Bibliographic Details
Main Authors: YangChi-Chang, 楊啟昌
Other Authors: Chuan-Feng Shih
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/35654943803744544248