Effect of Titanium Addition on Mechanical and Tribological Properties of Carbon Nitride Coating Prepared by DC Magnetron Sputtering
碩士 === 國立成功大學 === 機械工程學系 === 104 === This thesis studies the mechanical and tribological properties of Titanium-doped carbon nitride coating deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite as carbon source. In this study, Ti-doped carbon nitride coating...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
|
Online Access: | http://ndltd.ncl.edu.tw/handle/30993442445753387355 |