Effect of Titanium Addition on Mechanical and Tribological Properties of Carbon Nitride Coating Prepared by DC Magnetron Sputtering

碩士 === 國立成功大學 === 機械工程學系 === 104 === This thesis studies the mechanical and tribological properties of Titanium-doped carbon nitride coating deposited by unbalanced DC magnetron sputtering using nitrogen-argon mixture gas and graphite as carbon source. In this study, Ti-doped carbon nitride coating...

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Bibliographic Details
Main Authors: Kuei-ChengYeh, 葉貴誠
Other Authors: Yen-Liang Su
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/30993442445753387355