Applying the AVM System to Machine Tool Industries
碩士 === 國立成功大學 === 製造資訊與系統研究所 === 104 === Automatic Virtual Metrology (AVM) system has been successfully applied to many high-tech industries such as the semiconductor industry. It can convert sampling inspection with metrology delay into real-time and online total inspection. Currently, the precisio...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/cgdsd6 |