Sensing Properties of Electrolyte-Insulator-Semiconductor (EIS) Fabricated at Nano Patterns.
碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === This study addresses on the characteristics of Electrolyte-Insulator-Semiconductor (EIS), with stack membrane (3-aminopropyltriethoxysilane (APTES) / silicon dioxide) and nano structures, fabricated by nanoimprint lithography. The results of measurements su...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/j7g539 |