Study on Electrolyte-Insulator-Semiconductor (EIS) Sensing Membranes with Microscale Structures
碩士 === 國立暨南國際大學 === 電機工程學系 === 105 === In this thesis, the Electrolyte-Insulator-Semiconductors with microscale structures were fabricated by inductively coupled plasma etching. In our results, the hysteresis of sensor was improved with the 50 nm SiO2 sensing membrane. The sensitivity, hysteresi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45hg9m |