Application of AlxOy Film for Nitride-Based Material Optoelectronic Devices
碩士 === 國立交通大學 === 光電系統研究所 === 104 === Traditional fabrication of aluminum oxide (AlxOy) thin film requires a vacuum system and also incurs higher process costs. To help alleviate these constraints, this study explores the use of an organic aluminum solution to fabricate AlxOy thin film through t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/b7e6bw |