Study of Junctionless GAA nanowire FETs with extended gate as Biosensors
碩士 === 國立交通大學 === 材料科學與工程學系奈米科技碩博士班 === 104 === Integration of gate-all-around (GAA) silicon nanowire (NW) field-effect-transistor (FET) and extended gate as sensor for real-time detection of biomolecules in microfluidic system is the focus of this thesis. Both junctionless (JL) and inversion mode (...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2015
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Online Access: | http://ndltd.ncl.edu.tw/handle/s5pcep |