Process Improvement of Hexagonal - Type pH and Temperature Sensing Probe and Three Dimensional Heart Muscle pH Monitoring with Temperature Compensation
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === This thesis improve the process of a hexagonal type micro-machined silicon needle comprising of a Cu-based resistance temperature probe and a (IrOx)/AgCl pH sensing probe which are manufactured by flip-bond technology. We discuss the difference of AgCl film...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61998950227319816193 |