Process Improvement of Hexagonal - Type pH and Temperature Sensing Probe and Three Dimensional Heart Muscle pH Monitoring with Temperature Compensation

• Main Authors: Li, Yuan-Ding, 李元鼎
• Other Authors: Yu-Ting Cheng
• Format: Others
• Language: zh-TW
• Published: 2015
• Online Access: http://ndltd.ncl.edu.tw/handle/61998950227319816193

碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === This thesis improve the process of a hexagonal type micro-machined silicon needle comprising of a Cu-based resistance temperature probe and a (IrOx)/AgCl pH sensing probe which are manufactured by flip-bond technology. We discuss the difference of AgCl film grow on sputtered and electroplated Ag film and the effect of IrOx by followed process , then modify the process flow to improve the yield of sensing probe . By the probe, we can execute real-time myocardium monitoring in a pig-heart and set up a three-dimensional image to observe pH distribution. Besides, according to the Nernst equation, we can construct a temperature compensation map and observe a 0.5 of pH value difference after with temperature compensation. The sensing probe can exhibit 0.029Ω/°C and -60~-70mV/pH sensitivity for the detection of pH and temperature, respectively. We expect the sensing probe can facilitate a multi-point detection with the usage of multiple probes, especially for enhance the success rate of heart transplant surgery.