Process Improvement of Hexagonal - Type pH and Temperature Sensing Probe and Three Dimensional Heart Muscle pH Monitoring with Temperature Compensation
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === This thesis improve the process of a hexagonal type micro-machined silicon needle comprising of a Cu-based resistance temperature probe and a (IrOx)/AgCl pH sensing probe which are manufactured by flip-bond technology. We discuss the difference of AgCl film...
Main Authors: | Li, Yuan-Ding, 李元鼎 |
---|---|
Other Authors: | Yu-Ting Cheng |
Format: | Others |
Language: | zh-TW |
Published: |
2015
|
Online Access: | http://ndltd.ncl.edu.tw/handle/61998950227319816193 |
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