On The Performances of In0.53Ga0.47As nMOSFETs Using Post Remote-Plasma Treatment And PEALD-AlN Passivation Layer

碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === Advanced future CMOS technology will rely on the innovation of materials, architecture, and transport theory. As conventional silicon complementary metal oxide semiconductor (CMOS) scaling approaches end of the roadmap, III-V compound semiconductors have be...

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Bibliographic Details
Main Authors: Cheng, Shou-Po, 鄭守博
Other Authors: Huang, Guo-Wei &; Huang, Tiao-Yuan
Format: Others
Language:en_US
Published: 2015
Online Access:http://ndltd.ncl.edu.tw/handle/9c3x34