Effects of Microwave Annealing on IGZO Layer Deposited by APPECVD for RRAM Device
碩士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === Non-volatile memory (NVM) plays a important role in modern science, and it is essential in almost every consumer electronic products. The most prevalent NVM used nowadays is flash memory. However, with the scaling down of semiconductor device, tunneling o...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2015
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/58b8nu |